Projects per year
Personal profile
Courses
Semiconductor Devices and Physics
Semiconductor Experiments
Structures and Properties of Materials
Seminar
Semiconductor Device Design
Process and Device Simulation for Semiconductor Technology
Education
Keywords
- Material analysis
- Semiconductor device design
- TCAD
Fingerprint
- 1 Similar Profiles
Collaborations and top research areas from the last five years
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Developing Differential Hall Technique to Investigate the Dopant Activation Mechanism near Room Temperature after Ion Implantation
Chang, R.-D. (PI)
01/08/25 → 31/07/26
Project: National Science and Technology Council › National Science and Technology Council Academic Grants
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Developing Differential Hall Technique to Investigate the Dopant Activation Mechanism near Room Temperature after Ion Implantation
Chang, R.-D. (PI)
01/08/24 → 31/07/25
Project: National Science and Technology Council › National Science and Technology Council Academic Grants
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Investigation of Activation Mechanisms during Microwave Annealing for Dopants Implanted under the Amorphization Threshold
Chang, R.-D. (PI)
01/08/23 → 31/07/24
Project: National Science and Technology Council › National Science and Technology Council Academic Grants
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Investigation of the Carrier Formation Mechanism Affected by Ion Implantation Defects
Chang, R.-D. (PI)
01/08/22 → 31/07/23
Project: National Science and Technology Council › National Science and Technology Council Academic Grants
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Low-Temperature Activation of Boron in Germanium Substrates with Low Implantation Damages
Chang, R.-D. (PI)
01/08/21 → 31/07/22
Project: National Science and Technology Council › National Science and Technology Council Academic Grants
Research output
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Differential Hall analysis of the carrier profile in germanium due to the doping effect of as-implanted boron
Chang, R. D., Lee, B. W. & Lin, J. C., 02 2025, In: MRS Advances. 10, 2, p. 193-197 5 p.Research output: Contribution to journal › Journal Article › peer-review
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出席「International Conference on Ion Implantation Technology」報告
Chang, R.-D., 2024.Research output: Contribution to conference › International Conference Report
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A Surface Potential Model for Metal-Oxide-Semiconductor Transistors Operating near the Threshold Voltage
Chow, H. C., Lee, B. W., Cheng, S. Y., Huang, Y. H. & Chang, R. D., 10 2023, In: Electronics (Switzerland). 12, 20, p. 4242 - 4242 1 p., 4242.Research output: Contribution to journal › Journal Article › peer-review
Open Access -
Time evolution of donor activation at low temperatures with co-implantation of phosphorus and hydrogen in silicon
Lee, B. W., Lin, J. C., Chang, R. D., Chu, C. M. & Woon, W. Y., 04 2023, In: Materials Science in Semiconductor Processing. 157, 107332.Research output: Contribution to journal › Journal Article › peer-review
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Effect of hydrogen implantation on low-temperature activation of boron in silicon
Lin, J. C., Lee, B. W., Chang, R. D., Chu, C. M. & Woon, W. Y., 15 10 2021, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 505, p. 58-63 6 p.Research output: Contribution to journal › Journal Article › peer-review
2 Scopus citations
Activities
- 1 Participating in a conference, workshop, ...
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International Conference on Ion Implantation Technology
Chang, R.-D. (Participant)
23 09 2024 → 26 09 2024Activity: Participating in or organizing an event › Participating in a conference, workshop, ...