3d Spacer Ultra Thin Silicon Substrate and Nano Crystal Memory Membrane for Sub-Um Spatial Resolution Laps System Development

The improvements on the spatial resolution of current LAPS are proposed in this project. First, the ultra-thin silicon substrate with 3-dimensional check board spacers will be fabricated by self-design mask and MEMS process. Then sensing membrane with Gd nano crystal memory is presented to increase the pH sensitivity and selectivity. Finally, infrared ray laser combined with digital micro mirror array will be further investigated. The goal of this project is to improve spatial resolution to sub-um level and future goal is to implement this LAPS system to test the activity of a cell. There are three parts of investigation in this project: 􀁺 Part 1: Multi-mesh LAPS of ultra-thin silicon substrate with 3-dimensional check board spacers 1. Design and fabrication of the masks for LAPS device based on the point of view in process integration and test key design 2. Ultra-thin silicon substrate with 3-dimensional check board spacers combined with NbO2 high k sensing membrane 3. Super position algorithm on multi-level photo current measured by multi-mesh check board LAPS 􀁺 Part 2: LAPS with nano crystal memory membrane and flash LAPS with high sensitivity 1. Process of the LAPS with Gd nano crystal memory membrane 2. Modification on the voltage and time of charge injection for pH sensitivity optimization 3. Modification on the thickness of limit layer and penetration layer for pH sensing characterization. 􀁺 Part 3: LAPS with the infrared ray light source controlled by DLP system 1. Characterization on the basic pH sensing performance and spatial resolution based on the DLP system with LED light source 2. Development on the control and data interface based on Labview 3. Verification on the spatial resolution of the ultra-thin silicon substrate with 3-dimensional check board spacers based on the infrared ray laser and optic lenses Final results of this project can demonstrate a sensor array with high spatial resolution which could help on cell-based biomedical test and monitor. It is a great contribution for future biomedical sensor developments and applications.

Project ID:PB10107-0610
External Project ID:NSC101-2218-E182-004