A Health Sensing Module Based on Plastic Substrates with Multi-Plasma Treatments, Graphene Oxide (II)

In this project, a health sensing module integrated with a 2-dimensional chemical imaging sensor with high spatial resolution and a NH3 gas sensor with operation at room-temperature and low detection limitation by means of multi plasma treatment, graphene oxide and nano structures is proposed. This proposal will be worked out by 3 years. Currently, good results obtained in 1st-year project and following proposal with 2nd and 3rd year are presented with targets as listed below: 1st year: Analog micro-mirror system was already built up with good 2-D chemical image and its scanning speed of 200 μs/pixel is in the leading point of this field. In the meantime, Nb2O5 was verified with good pH sensing performance. Plasma treatments for better ion selectivity and spatial resolution improvement of LAPS to μm level are progressing. This achievement will be the leading performance of chemical imaging sensing field in the world. 2nd year：To optimize the spatial resolution of LAPS, glass and plastic substrate are proposed with low temperature processes including graphene and polystyrene (PS) nanospheres line definition by high-precision inkjet printing technology. This developed nanosturucture can be also applied for resistive gas sensor with operation temperature at 25oC and lowest detection concentration of 100 ppb. 3rd year：Inkjet printing system will be upgraded with the ability of line width of 10 μm for the process of graphene, graphene oxide and polystyrene (PS) nanosphere. In the meantime, multi-plasma treatments are investigated for high selectivity and low detecting limitation of gas sensor. By process integration design, a health sensing module with 2-D chemical image sensing and gas sensing array will be fabricated.

Project ID:PB10308-3321
External Project ID:MOST103-2221-E182-066