Acid Catalyzed Cross-linking Kinetics and Glass Transition Temperature of Deep UV Negative Photo Resist

Chen, Jung-Ting (PI)

Department of Chemical and Materials Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PA8905-0320
External Project ID:NSC89-2216-E182-001

Status	Finished
Effective start/end date	01/08/99 → 31/07/00

Access Project

https://www.grb.gov.tw/search/planDetail?id=523848