Atomic Layer Deposition for Nanometer Metal Gate and High-K Dielectrics

Lai, Chao-Sung (PI)
Chang, Ruey-Dar (CoPI)
Liu, Kou-Chen (CoPI)

Department of Electronic Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB9211-0087
External Project ID:NSC92-2623-7182-006

Status	Finished
Effective start/end date	01/10/03 → 31/12/04

Access Project

https://www.grb.gov.tw/search/planDetail?id=884685