Developed Mg and Al Doped Zno Applied Bio-Sensor in Kidney Function Test.

Since our lab has completed the high-dielectric zinc titanate (ZnTiO3) dielectric film as a sensing thin film and RTA to produce high-performance ion sensing element for hydrogen (H+), sodium (Na) ions and urea related biomedical sensing research. This year we use magnesium (Mg), and aluminum (Al), respectively, in the zinc oxide (ZnO), are expected to increase its band gap and increase the lattice bonding strength. Improving dielectric properties of the materials by magnesium doping has become a subject of great interest in recent years. This project proposal includes research planning for 2 years. In the first year, we will use MgZnO as a sensing thin film to be deposited on silicon oxide (SiO2) and silicon (Si) wafers as sensing thin film. This is used in ion sensing element (EIS Sensor) research. The double-layer and single-layer sensing films will be fabricated. The gas flow ratio of argon and oxygen shall be varied with different ratios. The effect of oxygen on MgZnO can be greatly influenced by the rapid thermal annealing at different temperatures (RTA). So the devices can be fabricated with different conditions of RTA temperature and gas ambient. Thus, it is possible to obtain sensing devices with improved features. In addition, MgO can form MgO-Zn alloy with unchanged lattice structure and higher energy gap. In the second year, aluminium zinc oxide (AlZnO) will be developed as a sensing film, in the form of double and single sensing films. The ratio of argon to oxygen gas flow will be varied and the temperature of the rapid thermal anneal (RTA) environment will also be varied, hoping to get better characteristics of the sensor. Finally, we will use MgZnO and AlZnO to improve the characteristics of the sensing thin film when doped with Mg and Al will be applied to the EIS sensor and the extended gate field effect sensor (EGFET Sensor). The EIS sensor and EGFET made with AlZnO and MgZnO can be used for the detection of kidney-related diseases and measurement of kidney-related important values. Sensory studies such as DNA, creatinine, glucose, urea and other different ions have been used in biomedicine. Previously we have characterized zinc titanate (ZnTiO3) sensing film. It is expected to replace the traditional sensing element with ZnTiO3, AlZnO and MgZnO sensing films, and committed to the practical application in clinical medicine.

Project ID:PB10708-2108
External Project ID:MOST107-2221-E182-036