Development of Graphine and Mgo Membrane Combined with Cf4 Plasma in Biosensor Applications

  • Kao, Chyuan-Haur (PI)

Project: National Science and Technology CouncilNational Science and Technology Council Academic Grants

Project Details


The objective of this program is to integrate graphene with promising ferroelectric material oxide, magnesium oxide (MgO) to produce a high permittivity dielectric layer with high sensitivity and accuracy for bio-medical sensors. We further implemented rapid thermal annealing (RTA) and titanium (Ti) incorporation for improvement in sensitivity and linearity. Along with the electrical properties, we also studied the morphological features and physical analysis to study the material characteristics of the fabricated devices. A morphological and material characteristic of the devices provides information about the bulk and interface content of the fabricated devices. Proper knowledge about the material characteristics can be used for regulation RTA and Ti doping for passivation of defects of fabricated devices. We further want to subject our deposited sample with carbon tetrafluoride (CF4 plasma) plasma and ammonia (NH3 plasma) plasma surface treatment for fluorination and nitrogen passivation, respectively. We further want to enable our sensors to measure glucose, urea, DNA and other different chemicals consisting of ions. The project proposal consists of plans for the two years. The first year we will use graphene (Graphene) and magnesium oxide (MgO) materials to produce thin-film sensing element and we will try to optimize the sensing characteristics by varying different parameters, such as oxygen partial pressure (OPP), annealing temperature for RTA treatment. Meanwhile, we will apply graphene as a sensing layer on the thermally grown silicon oxide (Si〇2) and observe its effect after integration with high-k materials like MgO. The second year we use the above developed graphene and magnesium oxide (MgO) material as a sensing film, to produce ion sensing devices (EIS,ISFET) and treat with carbon tetrafluoride (CF4) and ammonia (NH3) plasma processing to enhance the performance and accuracy of the sensing devices. We are expecting to fabricate the device with performance and reliability as good as commercially available devices for glucose and urea sensing. We are interested to implement our fabricated device at clinical level.

Project IDs

Project ID:PB10507-0992
External Project ID:MOST105-2221-E182-009
Effective start/end date01/08/1631/07/17


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