Development of ICP Dry Etching Technique for GaN Laser Diodes

  • Wang, Ming-Cheng (PI)

Project: National Science and Technology CouncilNational Science and Technology Council Academic Grants

Project Details

Project IDs

Project ID:PB8910-0825
External Project ID:NSC89-2215-E182-011
StatusFinished
Effective start/end date01/08/0031/10/01

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