Development of Optical Coherent Ellipsometer and Measurements of Degrees of Polarization and Coherence of Two-Frequency Paired Linear Polarized Laser Beam Induced by Scattering Object

An accurate optical coherent ellipsometer (OCE) is proposed and setup in which a two-frequency paired linear polarized laser beam is integrated with a common-path heterodyne interferometer. This OCE is able to precisely measure the optical properties of scattering specimen by measuring ellipsometric parameters (Δ, ). In the mean time the degree of polarization P, and degree of coherence of incident two-frequency linear polarized laser beam are measured too. In the experiment, both smooth and scattering test plates are going to be examined in which the optical parameters (P, , Δ, ) are able to be obtained precisely. Comparing with conventional ellipsometers, OCE can characterize scattering specimen precisely and excludes the scattering effect.

Project ID:PB9902-1125
External Project ID:NSC98-2221-E182-064-MY3