Project Details
Abstract
An accurate optical coherent ellipsometer (OCE) is proposed and setup in
which a two-frequency paired linear polarized laser beam is integrated with a
common-path heterodyne interferometer. This OCE is able to precisely measure the
optical properties of scattering specimen by measuring ellipsometric parameters (Δ,
). In the mean time the degree of polarization P, and degree of coherence of
incident two-frequency linear polarized laser beam are measured too. In the
experiment, both smooth and scattering test plates are going to be examined in which
the optical parameters (P, , Δ, ) are able to be obtained precisely. Comparing with
conventional ellipsometers, OCE can characterize scattering specimen precisely and
excludes the scattering effect.
Project IDs
Project ID:PB9807-2492
External Project ID:NSC98-2221-E182-064-MY3
External Project ID:NSC98-2221-E182-064-MY3
Status | Finished |
---|---|
Effective start/end date | 01/08/09 → 31/07/10 |
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