Distributed Modeling and Dynamic OEE Evaluation of the AMHS in the 300 mm Fab

  • Kuo, Chung-Hsien (PI)

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project Details

Project IDs

Project ID:PB9008-0976
External Project ID:NSC90-2212-E182-009
StatusFinished
Effective start/end date01/08/01 → 31/07/02

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