Igzo Thin Film Light-Addressable Potentiometric Sensors on Plastic Substrate for High-Resolution 2d Dynamic Biomedical Image of Intestinal Cells

In this project, a biomedical sensing chip for simultaneous detection on hydrogen, potassium, calcium ion concentration and cell activity is proposed. The novelty of this research is on new semiconductor material indium gallium zinc oxide (IGZO) and low temperature process on transparent substrates. A high-k material layer, niobium oxide (NbOx), and an inserting Au layer will be investigated for the sensing membrane. Finally a light-addressable potentiometric sensor with high photovoltage and high frequency signal in UV lighted can be easily obtained based on IGZO layer, which could improve the spatial resolution to 10 um. With our developed analog micro mirror scanning technique, a real-time and high-resolution 2D biomedical image could be obtained for monitoring on cell culture, drug and nanotoxicity. It would be the leading achievement around the world. Final target of contribution is to provide a precise, easy operation, low cost lab-on-chip for clinical, research and home care application. Even a real-time test on tumor cells by integrating with colonoscopy could be evaluated in the future. This proposal will be worked out by 3 years with targets as listed below: 1st year: High photovoltage and high frequency operating IGZO thin film LAPS IGZO layer fabricated on glass substrate will be investigated for the material and electrical properties first. Photovoltage, signal frequency, pH sensing performance and spatial resolution will be detail verified based on IGZO LAPS with NbOx sensing membrane. 2nd year: High spatial resolution and dynamic 2D biomedical images based on IGZO thin film LAPS Process optimization of IGZO and miniaturization of light spot are both used to improve spatial resolution. Caco-2 intestinal cell culture and following chemotherapy on IGZO LAPS will be tested. LAPS array including hydrogen, potassium, and cacilum ion selective membranes will be applied for the initial study of high spatial resolution and dynamic 2D image. 3rd year: Drug and toxicity effect on cells based on IGZO LAPS with plastic substrate IGZO LAPS fabricated on plastic substrate and embedded with reference electrode is used to verify the drug and nanotoxicity on Caco-2 cell line. A lab on chip (LOC) could be obtained by IGZO LAPS integrated with microfluidics. A flexible chemical image will be studied on curved surface of plastic substrate for real applications.

Project ID:PB10507-1872
External Project ID:MOST105-2221-E182-057-MY3