Modeling and Analysis of Dopant Segregation at Oxide/Silicon Interface

Project: National Science and Technology CouncilNational Science and Technology Council Academic Grants

Project Details

Project IDs

Project ID:PA8905-0422
External Project ID:NSC89-2215-E182-003
Effective start/end date01/08/9931/07/00


  • Interface segregation
  • Dopant
  • Diffusion
  • Silicon
  • Oxide


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