Monitoring Chemical Polishing Solution by Using AC Impedance Measurement

Lin, Andrew Shiou-Jeng (PI)

Department of Chemical and Materials Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB9308-5774
External Project ID:NSC93-2622-E182-004-CC3

Status	Finished
Effective start/end date	01/05/04 → 30/04/05

Access Project

https://www.grb.gov.tw/search/planDetail?id=1033488