Novel Graphenated Copper Interconnect Structure for Advanced Vlsi

Tan, Cher-Ming (PI)

Department of Electronic Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB10807-10694
External Project ID:MOST108-2221-E182-027

Status	Finished
Effective start/end date	01/08/19 → 31/07/20

Keywords

Graphenated Cu Interconnect
Metal-Graphene-Metal
Finite Element Model
Electroless plating
induction heating
graphene synthesis
electromigration

Access Project

https://www.grb.gov.tw/search/planDetail?id=13141159