Process Developments and Applications of Of Novel Nanowire Bio-Sensor with Rram Embedded Structure

In this NSC project, we propose a novel nanowire with resistive random access memory (RRAM) embedded structure for bio-sensor. The memory layer will be utilized as a sensing membrane to monitor the biomolecule binding as it will influence the conductivity of the corresponding layer. A novel sensing membrane embedded with Na+, K+, Mg++, Ca++ by sol-gel technique will be used in the multisegmented nanowire structure in order to improve the Na、k、Mg、Ca ion sensitivity. We hope, this novel structure will deliver a wide field of sensor like immunosensor, enzyme sensor, glucose sensor, ion sensor, pH sensor etc. ◆ First year：Novel nanowire bio-sensor with resistive random access memory(RRAM) embedded structure---Design fabrication process of novel nanowire bio-sensor with RRAM structure. According to this purpose, we can establish seven main directions at first year： 1. Deposition techniques of sensing membrane by sol-gel method. 2. Characterization of sensing membrane with sol-gel method. 3. Process development of RRAM with Gd metal oxide and Carbon nanotube transition layer. 4. Characterization of RRAM with Gd metal oxide and Carbon nanotube transition layer. 5. Process development of nanowire. 6. Characterization of nanowire. 7. Process development of dielectrophoretic device. ◆ First year：Novel nanowire bio-sensor with resistive random access memory(RRAM) embedded structure--- Nanowire RRAM structure applied in novel ion sensor and characterization of ion sensing properties. According to this purpose, we can establish five main directions at second year： 1. Deposition techniques of Na、K、Mg and Ca sensing membrane with sol-gel method. 2. Characterization of ion sensing properties of Na、K、Mg and Ca sensing membrane with sol-gel method. 3. Techniques development of nanowire controller by dielectrophoretic force. 4. Process development of novel ion sensor with nanowire RRAM structure. 5. Characterization of novel ion sensor with nanowire RRAM structure. ◆ First year：Novel nanowire bio-sensor with resistive random access memory(RRAM) embedded structure---Novel nanowire bio-sensor with RRAM embedded structure applied in Bio-detection According to this purpose, we can establish fiver main directions at third year： 1. Establish the enzyme immobilization method. 2. Process development of enzyme sensing device with nanowire RRAM structure. 3. Process development of immunological assay device with nanowire RRAM structure. 4. Analysis on the concentrations of ions, glucose and urea in urine. 5. Analysis on the interaction of antigen-antibody. The developed results are useful for achieving microminiaturized sensing chips as sensor for bio-medical detection. And this development must be one of the most important publications on bio-sensors region in future.

Project ID:PB10001-0994
External Project ID:NSC99-2221-E182-056-MY3