Structural and Process Optimization for 3D Transistors in Nanometer DRAM Cells

Lin, Jeng-Ping (PI)

Department of Electronic Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB9208-2622
External Project ID:NSC92-2218-E182-006

Status	Finished
Effective start/end date	01/08/03 → 31/07/04

Access Project

https://www.grb.gov.tw/search/planDetail?id=874870