The Process Development for SOI Sevice with Metal Gate

Lai, Chao-Sung (PI)
Chang, Ruey-Dar (CoPI)
Yang, Jun-Zhe (CoPI)

Department of Electronic Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB9009-0968
External Project ID:NSC90-2215-E182-003

Status	Finished
Effective start/end date	01/08/01 → 31/07/02

Keywords

Silicon-on-insulator (SOI)
Metal gate
Process development

Access Project

https://www.grb.gov.tw/search/planDetail?id=666163