The Process Development for Ultra-Thin Oxides

Lai, Chao-Sung (PI)

Department of Electronic Engineering

Project: National Science and Technology Council › National Science and Technology Council Academic Grants

Project IDs

Project ID:PB8801-0200
External Project ID:NSC88-2215-E182-001

Status	Finished
Effective start/end date	01/08/98 → 31/07/99

Keywords

Ultra thin gate oxide
Native oxide film
Photo-resist ashing
Deep submicron
Direct tunneling current
Soft breakdown

Access Project

https://www.grb.gov.tw/search/planDetail?id=418207