Validation and Characterization of Yag Thin Film in Egfet for Disposable Sensor Applications

Project: National Science and Technology CouncilNational Science and Technology Council Academic Grants

Project Details

Abstract

本計畫將開發一個高靈敏度的延伸閘極場效電晶體(EGFET)離子感測平台,結合離子束輔助沉積(IBAD)技術製備高品質釔鋁榴石(YAG)薄膜,針對薄膜表面狀態與結構特性進行優化分析。透過自行開發的多通道恆壓恆流(CVCC)系統,實現感測特性(漂移、遲滯與靈敏度)的精準量測與分析。並進一步探討YAG薄膜於pH感測及生物檢測應用的潛力,以拋棄式設計提升感測器的穩定性與便利性。最終預期產出具高穩定性與靈敏度的EGFET感測晶片,未來可廣泛應用於生物醫療檢測、環境監控與食品安全等領域,並進一步開發便攜式檢測系統,推動感測技術的商品化與普及,為智慧檢測平台的發展提供關鍵技術支持。

Project IDs

Project ID:PB11407-8846
External Project ID:NSTC114-2622-E182-002
StatusActive
Effective start/end date01/06/2531/05/26

Keywords

  • EGFET
  • IBAD
  • pH sensing
  • YAG

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