一種氨化感測薄膜之表面處理方法

Translated title of the contribution: SURFACE TREATMENT METHOD BY USING THE NH3 PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM

Chien I. Chou (Inventor), Yu-Sun Chang (Inventor), Jau-Song Yu (Inventor), Chao-Sung Lai (Inventor), Jyh-Ping Chen (Inventor), WENYU CHUANG (Inventor), ISHUN WANG (Inventor), YITING LIN (Inventor), TSENGFU LU (Inventor), POLUNG YANG (Inventor), TING-JUN YU (Inventor)

Research output: Patent

Abstract

The NH3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.
Translated title of the contributionSURFACE TREATMENT METHOD BY USING THE NH3 PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM
Original languageChinese (Traditional)
IPCG01N 33/543(2006.01)
StatePublished - 01 01 2013

Bibliographical note

公開公告號: 2.01300778E8
Announcement ID: 2.01300778E8

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