Abstract
The NH3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.
Translated title of the contribution | SURFACE TREATMENT METHOD BY USING THE NH3 PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM |
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Original language | Chinese (Traditional) |
IPC | G01N 33/543(2006.01) |
State | Published - 01 01 2013 |
Bibliographical note
公開公告號: 2.01300778E8Announcement ID: 2.01300778E8