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一種氨化感測薄膜之表面處理方法

Translated title of the contribution: SURFACE TREATMENT METHOD BY USING THE NH3PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM
  • Chien I. Chou (Inventor)
  • , Yu-Sun Chang (Inventor)
  • , Jau-Song Yu (Inventor)
  • , Chao-Sung Lai (Inventor)
  • , Jyh-Ping Chen (Inventor)
  • , WENYU CHUANG (Inventor)
  • , ISHUN WANG (Inventor)
  • , YITING LIN (Inventor)
  • , TSENGFU LU (Inventor)
  • , POLUNG YANG (Inventor)
  • , TING-JUN YU (Inventor)

Research output: Patent

Abstract

The NH3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.
Translated title of the contributionSURFACE TREATMENT METHOD BY USING THE NH3PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM
Original languageChinese (Traditional)
Patent numberI596340
IPCG01N 33/543(2006.01)
StatePublished - 21 08 2017

Bibliographical note

公開公告號: I596340
Announcement ID: I596340

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