Abstract
The NH3 plasma treatment by remote plasma is firstly proposed to replace the covalent bonding process during surface modification procedure that for amine bond generation.
| Translated title of the contribution | SURFACE TREATMENT METHOD BY USING THE NH3 PLASMA TREATMENT TO MODIFY THE SENSING THIN-FILM |
|---|---|
| Original language | Chinese (Traditional) |
| IPC | G01N 33/543(2006.01) |
| State | Published - 01 01 2013 |
Bibliographical note
公開公告號: 2.01300778E8Announcement ID: 2.01300778E8