以射頻共濺鍍方式沉積鋯摻雜於氧化鋅薄膜電晶體之研究

Translated title of the contribution: The Investigation of Zr doped ZnO Thin Film Transistor by RF co-sputtering technology

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Research output: Types of Thesis › Master's thesis

Translated title of the contributionThe Investigation of Zr doped ZnO Thin Film Transistor by RF co-sputtering technology
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chiu, Hsien-Chin, Supervisor
StatePublished - 2013
Externally publishedYes

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