Translated title of the contribution | Deposition of n-type and p-type Aluminum Zinc Oxide Transparent Conductive Thin Films by RF Magnetron Sputtering Using Oxide Targets |
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Original language | Chinese (Traditional) |
Supervisors/Advisors |
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State | Published - 2008 |
Externally published | Yes |
以氧化物靶材配合RF磁控製備n型及p型Al:ZnO透明導電氧化物薄膜之探討
賴積佑
Research output: Types of Thesis › Master's thesis