以氧化物靶材配合RF磁控製備n型及p型Al:ZnO透明導電氧化物薄膜之探討

Translated title of the contribution: Deposition of n-type and p-type Aluminum Zinc Oxide Transparent Conductive Thin Films by RF Magnetron Sputtering Using Oxide Targets

賴積佑

Research output: Types of ThesisMaster's thesis

Translated title of the contributionDeposition of n-type and p-type Aluminum Zinc Oxide Transparent Conductive Thin Films by RF Magnetron Sputtering Using Oxide Targets
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2008
Externally publishedYes

Cite this