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以AZO氧化物靶材配合RF反應濺鍍製備之p-type氮鋁共摻雜氧化鋅薄膜導電機構之探討

Translated title of the contribution: Deposition and Electrical Conductive Mechanism of p-type Aluminum and Nitrogen Co-doped Zinc Oxide TransparentConductive Thin Films by Reactive RF Magnetron Sputtering with AZO Ceramic Target
  • 羅振洋

Research output: Types of Thesis › Master's thesis

Translated title of the contributionDeposition and Electrical Conductive Mechanism of p-type Aluminum and Nitrogen Co-doped Zinc Oxide TransparentConductive Thin Films by Reactive RF Magnetron Sputtering with AZO Ceramic Target
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2010
Externally publishedYes

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