低壓化學氣相沉積爐管之控壓系統實務改善

Translated title of the contribution: Practical Improvement of the Pressure Control System for the LPCVD Furnace

陳怡全

Research output: Types of Thesis › Master's thesis

Translated title of the contributionPractical Improvement of the Pressure Control System for the LPCVD Furnace
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Gow-Bin, Supervisor
StatePublished - 2013
Externally publishedYes

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