低壓化學氣相沉積爐管內晶圓溫度及膜厚之建模和控制

Translated title of the contribution: Modeling and Control of Wafer Temperature and Thickness in a LPCVD Furnace

黃禎祥

Research output: Types of Thesis › Master's thesis

Translated title of the contributionModeling and Control of Wafer Temperature and Thickness in a LPCVD Furnace
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Gow-Bin, Supervisor
StatePublished - 2010
Externally publishedYes

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