使用光定址電位勢感測器系統及氮電漿浸潤式離子佈植處理應用於三氧化二釤薄膜氯離子感測器

Translated title of the contribution: The Application of LAPS System and Nitrogen Plasma Immersion Ion Implantation Treatment on Sm2O3 Sensing Membrane Based Chlorine Ion Sensors

林于萱

Research output: Types of ThesisMaster's thesis

Translated title of the contributionThe Application of LAPS System and Nitrogen Plasma Immersion Ion Implantation Treatment on Sm2O3 Sensing Membrane Based Chlorine Ion Sensors
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Jer-Chyi, Supervisor
  • Lai, Chao-Sung, Supervisor
StatePublished - 2013
Externally publishedYes

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