使用光定址電位勢感測器系統及氮電漿浸潤式離子佈植處理應用於三氧化二釤薄膜氯離子感測器

林于萱

使用光定址電位勢感測器系統及氮電漿浸潤式離子佈植處理應用於三氧化二釤薄膜氯離子感測器

Translated title of the contribution: The Application of LAPS System and Nitrogen Plasma Immersion Ion Implantation Treatment on Sm2O3 Sensing Membrane Based Chlorine Ion Sensors

林于萱

Research output: Types of Thesis › Master's thesis

Translated title of the contribution	The Application of LAPS System and Nitrogen Plasma Immersion Ion Implantation Treatment on Sm2O3 Sensing Membrane Based Chlorine Ion Sensors
Original language	Chinese (Traditional)
Supervisors/Advisors	Wang, Jer-Chyi, Supervisor Lai, Chao-Sung, Supervisor
State	Published - 2013
Externally published	Yes

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http://thesis.lib.cgu.edu.tw/thesis/detail/fd85b53f19a2b28253fc87d7a8a67a49/

使用光定址電位勢感測器系統及氮電漿浸潤式離子佈植處理應用於三氧化二釤薄膜氯離子感測器

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