具多層薄膜結構之表面電漿共振檢測系統

Disclosed is a surface plasma resonance detection system with multi-layer thin film structure, comprising an incident light source, a prism, a light source detector, a substrate and a multi-layer thin film structure. The multi-layer thin film structure includes a top metal layer, a dielectric layer, and a bottom metal layer. Using the coupling effect of surface plasma of the two interfaces between the dielectric layer and up and down metal layers to change surface plasma characteristic between the underlayer metal surface and the medium to be tested, the SPR sensitivity of underlayer metal sensing surface is increased substantially for detecting very subtle concentration variation or chemical reaction of the medium to be tested. Optimal sensing sensitivity for a specific object to be tested can be obtained by adjusting structure parameters according to different objects to be tested. Problems of insufficient sensing sensitivity and restricted applications of existing SPR can be solved effectively by applying the disclosed system to various sensing circumstances.