| Original language | Chinese (Traditional) |
|---|---|
| State | Published - 2013 |
| Event | The 12th International Symposium on Sputtering & Plasma Processes - Kyoto, Japan Duration: 10 07 2013 → 12 07 2013 |
Conference
| Conference | The 12th International Symposium on Sputtering & Plasma Processes |
|---|---|
| Period | 10/07/13 → 12/07/13 |