利用低能量氧電漿浸沒式離子佈值方式處理技術改善鎢奈米晶點記憶體的儲存特性

Translated title of the contribution: Retention Improvement of Tungsten Nanocrystal Memory with Low Energy Oxygen Plasma Immersion Ion Implantation Treatment

張煒程

Research output: Types of ThesisMaster's thesis

Translated title of the contributionRetention Improvement of Tungsten Nanocrystal Memory with Low Energy Oxygen Plasma Immersion Ion Implantation Treatment
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2011
Externally publishedYes

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