利用電漿浸沒式離子佈植方式處理之鎢奈米晶體記憶體研究

Translated title of the contribution: Optimization of Tungsten Nanocrystals Memory with Various Treatment by Plasma Immersion Ion Implantation Method

廖英凱

Research output: Types of Thesis › Master's thesis

Translated title of the contributionOptimization of Tungsten Nanocrystals Memory with Various Treatment by Plasma Immersion Ion Implantation Method
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lai, Chao-Sung, Supervisor
  • Wang, Jer-Chyi, Supervisor
StatePublished - 2010
Externally publishedYes

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