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利用MOCVD成長AlN於Si基板上之介面特性的研究

Translated title of the contribution: The study of AlN interface properties on Si by MOCVD
  • 曾建元

Research output: Types of Thesis › Master's thesis

Translated title of the contributionThe study of AlN interface properties on Si by MOCVD
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chen, Nai-Chuan, Supervisor
  • Chang, Pen-Hsiu, Supervisor
StatePublished - 2004
Externally publishedYes

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