前驅溶液備製條件與溶膠性質對ITO溶凝膠靶材及ITO濺鍍薄膜特性影響之探討

Translated title of the contribution: Effects of precursor preparation conditions and sol properties on the characteristics of sol-gel derived ITO targets and sputter-deposited ITOthin films

王琬珺

Research output: Types of ThesisMaster's thesis

Translated title of the contributionEffects of precursor preparation conditions and sol properties on the characteristics of sol-gel derived ITO targets and sputter-deposited ITOthin films
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lu, Hsin-Chun, Supervisor
StatePublished - 2003
Externally publishedYes

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