化學機械研磨製程之適應EWMA 控制

Translated title of the contribution: Adaptive EWMA Control for Chemical Mechanical Polishing Process

陳士榮

Research output: Types of Thesis › Master's thesis

Translated title of the contributionAdaptive EWMA Control for Chemical Mechanical Polishing Process
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Gow-Bin, Supervisor
StatePublished - 2006
Externally publishedYes

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