半導體製造廠設備綜合效率之改善研究—以I公司之ArF Scanner機台為例

Translated title of the contribution: Improving OEE in Semiconductor Manufacturing - A Case of ArF Scanncer in I Company

孫明隆

Research output: Types of ThesisMaster's thesis

Translated title of the contributionImproving OEE in Semiconductor Manufacturing - A Case of ArF Scanncer in I Company
Original languageChinese (Traditional)
Supervisors/Advisors
  • Lee, Wen-yih, Supervisor
StatePublished - 2006
Externally publishedYes

Cite this