Translated title of the contribution | Improving OEE in Semiconductor Manufacturing - A Case of ArF Scanncer in I Company |
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Original language | Chinese (Traditional) |
Supervisors/Advisors |
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State | Published - 2006 |
Externally published | Yes |
半導體製造廠設備綜合效率之改善研究—以I公司之ArF Scanner機台為例
孫明隆
Research output: Types of Thesis › Master's thesis