原子層沉積之二氧化鉿感測薄膜於生醫感測器之應用

Chia-Ming Yang; 增富 呂; 承恩 呂; 義舜 王; Chao-Sung Lai

原子層沉積之二氧化鉿感測薄膜於生醫感測器之應用

Chia-Ming Yang, 呂增富, 呂承恩, 王義舜, Chao-Sung Lai

Research output: Contribution to journal › Journal Article › peer-review

Original language	Chinese (Traditional)
Pages (from-to)	27-33
Journal	真空科技
Volume	26
Issue number	1
State	Published - 2013

Keywords

ALD
Atomic layer deposition
Hafnium oxide
HfO
Plasma
Radio frequency sputter
Sensing membrane
Urea sensor

Cite this

@article{20b5af480b7f48eeafce676dfea24b65,

title = "原子層沉積之二氧化鉿感測薄膜於生醫感測器之應用",

keywords = "二氧化鉿, 原子層沉積, 射頻濺鍍, 尿素感測器, 感測薄膜, 電漿, ALD, Atomic layer deposition, Hafnium oxide, HfO, Plasma, Radio frequency sputter, Sensing membrane, Urea sensor",

author = "Chia-Ming Yang and 增富呂 and 承恩呂 and 義舜王 and Chao-Sung Lai",

year = "2013",

language = "繁體中文",

volume = "26",

pages = "27--33",

journal = "真空科技",

issn = "1017-091X",

number = "1",

}

TY - JOUR

T1 - 原子層沉積之二氧化鉿感測薄膜於生醫感測器之應用

AU - Yang, Chia-Ming

AU - 呂, 增富

AU - 呂, 承恩

AU - 王, 義舜

AU - Lai, Chao-Sung

PY - 2013

Y1 - 2013

KW - 二氧化鉿

KW - 原子層沉積

KW - 射頻濺鍍

KW - 尿素感測器

KW - 感測薄膜

KW - 電漿

KW - ALD

KW - Atomic layer deposition

KW - Hafnium oxide

KW - HfO

KW - Plasma

KW - Radio frequency sputter

KW - Sensing membrane

KW - Urea sensor

M3 - 文章

SN - 1017-091X

VL - 26

SP - 27

EP - 33

JO - 真空科技

JF - 真空科技

IS - 1

ER -