| Translated title of the contribution | Construction of a Prediction Model of Wafer Temperature and Film Thickness in a Multiwafer LPCVD Furnace |
|---|---|
| Original language | Chinese (Traditional) |
| Supervisors/Advisors |
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| State | Published - 2011 |
| Externally published | Yes |
多片晶圓低壓化學氣相沉積爐管內晶圓 溫度及膜厚之預測模式建置
莊詠淞
Research output: Types of Thesis › Master's thesis