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射頻濺鍍三氧化二釹之堆疊高介電絕緣層於多晶矽之應用

Translated title of the contribution: RF Sputtering Nd2O3 Stacked High-k Dielectrics on the Polycrystalline Silicon
  • 廖昱程

Research output: Types of Thesis › Master's thesis

Translated title of the contributionRF Sputtering Nd2O3 Stacked High-k Dielectrics on the Polycrystalline Silicon
Original languageChinese (Traditional)
Supervisors/Advisors
  • Kao, Chyuan-Haur, Supervisor
StatePublished - 2010
Externally publishedYes

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