微波電將特性研究

Translated title of the contribution: Characterization and Diagnosis of Plasma for Microwave Plasma-aided CVD

吳亭緯

Research output: Types of Thesis › Master's thesis

Translated title of the contributionCharacterization and Diagnosis of Plasma for Microwave Plasma-aided CVD
Original languageChinese (Traditional)
Supervisors/Advisors
  • Liaw, Jiunn-Woei, Supervisor
StatePublished - 2008
Externally publishedYes

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