感測場效電晶體裝置

The invention discloses a sensitive field effect transistor apparatus, which uses an inorganic film to sense low hydrogen ions. The invention makes use of the film with high deformation stress to adjust the sensitivity of the sensitive film on hydrogen ion by altering the film thickness or changing the substrate type and doped concentration. A differential amplification circuit is used to read signal to form the inorganic ion sensitive field effect transistor/reference field effect transistor apparatus.