| Translated title of the contribution | Application of Multivariable Run-to-run Control for Shallow Trench Isolation Process of Chemical Mechanical Polishing |
|---|---|
| Original language | Chinese (Traditional) |
| Supervisors/Advisors |
|
| State | Published - 2008 |
| Externally published | Yes |
應用多變數批次間控制於化學機械研磨中的淺溝槽絕緣製程
- 鄭子浩
Research output: Types of Thesis › Master's thesis