應用模式預測控制技術於化學機械研磨製程

Translated title of the contribution: Application of Model Predictive Control Technology to Chemical Mechanical Polishing Process

陳君彥

Research output: Types of Thesis › Master's thesis

Translated title of the contributionApplication of Model Predictive Control Technology to Chemical Mechanical Polishing Process
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Gow-Bin, Supervisor
StatePublished - 2005
Externally publishedYes

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