| Translated title of the contribution | Fuzzy PID Control of Thin Film Deposition by |
|---|---|
| Original language | Chinese (Traditional) |
| Supervisors/Advisors |
|
| State | Published - 2008 |
| Externally published | Yes |
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應用模糊PID控制理論之真空濺鍍沈積反應性薄
- 曾慶沛
Research output: Types of Thesis › Master's thesis