應用部分最小平方模式為基礎的多變數批次間控制於化學機械研磨製程

Translated title of the contribution: Application of Partial Least Squares Model Based Multivariable Run-to-Run Control for Chemical Mechanical Polishing Process

張賀鈞

Research output: Types of Thesis › Master's thesis

Translated title of the contributionApplication of Partial Least Squares Model Based Multivariable Run-to-Run Control for Chemical Mechanical Polishing Process
Original languageChinese (Traditional)
Supervisors/Advisors
  • Wang, Gow-Bin, Supervisor
StatePublished - 2008
Externally publishedYes

Access to Document

Cite this