掃描電容顯微鏡之摻雜量測分析與模擬

Translated title of the contribution: The Analysis and Simulation of Doping Profile Measurement by Scanning Capacitance Microscopy

許家銓

Research output: Types of Thesis › Master's thesis

Translated title of the contributionThe Analysis and Simulation of Doping Profile Measurement by Scanning Capacitance Microscopy
Original languageChinese (Traditional)
Supervisors/Advisors
  • Chang, Ruey-Dar, Supervisor
StatePublished - 2003
Externally publishedYes

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