探討應變矽金氧半場效電晶體電性和可靠度特性

Tung-Ming Pan, 黃偉翔, 嚴立丞, 張文聰, 劉傳璽

Research output: Contribution to journal › Journal Article › peer-review

Cite this

@article{f7657087453c415091c91243dde9f50d,

title = "探討應變矽金氧半場效電晶體電性和可靠度特性",

keywords = "Bulk-Si, Carrier mobility, Hot carrier, NBTI, Strained-Si, 應變矽, 熱載子, 矽基板, 負偏壓溫度不穩定度, 載子遷移率",

author = "Tung-Ming Pan and 偉翔黃 and 立丞嚴 and 文聰張 and 傳璽劉",

year = "2008",

language = "繁體中文",

volume = "14",

pages = "151--162",

journal = "電子月刊",

issn = "1814-912X",

number = "5",

}

TY - JOUR

T1 - 探討應變矽金氧半場效電晶體電性和可靠度特性

AU - Pan, Tung-Ming

AU - 黃, 偉翔

AU - 嚴, 立丞

AU - 張, 文聰

AU - 劉, 傳璽

PY - 2008

Y1 - 2008

KW - Bulk-Si

KW - Carrier mobility

KW - Hot carrier

KW - NBTI

KW - Strained-Si

KW - 應變矽

KW - 熱載子

KW - 矽基板

KW - 負偏壓溫度不穩定度

KW - 載子遷移率

M3 - 文章

SN - 1814-912X

VL - 14

SP - 151

EP - 162

JO - 電子月刊

JF - 電子月刊

IS - 5

ER -