氣體感測元件

Chia-Ming Yang; Chao-Sung Lai; MINGCHE HSIAO; TSUNGCHENG CHEN

氣體感測元件

Translated title of the contribution: GAS SENSING UNIT

Chia-Ming Yang (Inventor), Chao-Sung Lai (Inventor), MINGCHE HSIAO (Inventor), TSUNGCHENG CHEN (Inventor)

Research output: Patent

Abstract

This invention provides a gas sensing unit and the producing method thereof. The gas sensing unit comprises a substrate, and a nano-pillar layer thereon. Furthermore, a detective layer is formed on the nano-pillar layer that causes a significant increase of the sensitivity and the recovery ability of the gas sensor, especially for sensing low concentration gas.

Translated title of the contribution	GAS SENSING UNIT
Original language	Chinese (Traditional)
IPC	G01N 33/497(2006.01)
State	Published - 01 06 2017

Bibliographical note

公開公告號: 2.01719168E8
Announcement ID: 2.01719168E8

Cite this

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title = "氣體感測元件",

abstract = "本發明提供了一種氣體感測元件及其製造方法，其中該氣體感測元件包含一基板，該基板上設有一微支柱層，再透過於其上鋪設單層石墨烯等偵測層之方式，使該氣體感測器具有良好的偵測及復原能力，特別是用於感測微量氣體時，效果最為顯著。",

author = "Chia-Ming Yang and Chao-Sung Lai and MINGCHE HSIAO and TSUNGCHENG CHEN",

note = "G01N 33/497(2006.01)",

year = "2017",

month = jun,

day = "1",

language = "繁體中文",

type = "Patent",

}

TY - PAT

T1 - 氣體感測元件

AU - Yang, Chia-Ming

AU - Lai, Chao-Sung

AU - HSIAO, MINGCHE

AU - CHEN, TSUNGCHENG

N1 - 公開公告號: 2.01719168E8 Announcement ID: 2.01719168E8

PY - 2017/6/1

Y1 - 2017/6/1

N2 - 本發明提供了一種氣體感測元件及其製造方法，其中該氣體感測元件包含一基板，該基板上設有一微支柱層，再透過於其上鋪設單層石墨烯等偵測層之方式，使該氣體感測器具有良好的偵測及復原能力，特別是用於感測微量氣體時，效果最為顯著。

AB - 本發明提供了一種氣體感測元件及其製造方法，其中該氣體感測元件包含一基板，該基板上設有一微支柱層，再透過於其上鋪設單層石墨烯等偵測層之方式，使該氣體感測器具有良好的偵測及復原能力，特別是用於感測微量氣體時，效果最為顯著。

M3 - 專利

ER -

氣體感測元件

Abstract

Bibliographical note

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